| 发明名称 |
Transparent resin, photosensitive composition, and method of forming a pattern |
| 摘要 |
A photosensitive composition comprising, an oligomer having a backbone chain comprising an alicyclic skeleton and/or a conjugated polycondensed aromatic skeleton, the backbone chain being acid-decomposable or hydrolyzable, and a photo-acid-generating agent.
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| 申请公布号 |
US6071670(A) |
申请公布日期 |
2000.06.06 |
| 申请号 |
US19970948425 |
申请日期 |
1997.10.10 |
| 申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
USHIROGOUCHI, TORU;OKINO, TAKESHI;SHIDA, NAOMI;NAKASE, MAKOTO;KAWAMONZEN, YOSHIAKI;HAYASE, RUMIKO;ASAKAWA, KOJI |
| 分类号 |
G03F7/004;G03F7/039;(IPC1-7):G03F7/004 |
主分类号 |
G03F7/004 |
| 代理机构 |
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