发明名称 |
Scored polishing pad and methods related thereto |
摘要 |
A polishing pad is provided comprising an upper surface and a lower surface, substantially parallel to one another, wherein the pad has enhanced flexibility produced by scoring of either or both surfaces. The pad thickness is generally greater than 500 mu . The scoring creates slits having a depth of less than 90% of the thickness.
|
申请公布号 |
US6071178(A) |
申请公布日期 |
2000.06.06 |
申请号 |
US19980109688 |
申请日期 |
1998.07.02 |
申请人 |
RODEL HOLDINGS INC. |
发明人 |
BAKER, III, ARTHUR RICHARD |
分类号 |
B24B37/04;B24D3/28;B24D13/14;(IPC1-7):B24B1/00 |
主分类号 |
B24B37/04 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|