发明名称 |
B2O3 MATERIAL FOR COATING SURFACE OF WALL OF CRUCIBLE, ITS PRODUCTION, PRODUCTION OF SINGLE CRYSTAL USING SAME AND SINGLE CRYSTAL PRODUCED BY SAID PRODUCTION |
摘要 |
PROBLEM TO BE SOLVED: To suppress the defective coating of the diameter increasing part of a crucible and to obtain a single crystal in a high yield by disposing a B2O3 material on the bottom of the crucible and melting it by heating to coat the surface of the wall of the crucible. SOLUTION: A hollow conical B2O3 material 5 is disposed so that it adheres to the lower tapering part 10 of a crucible 1. Preferably a polycrystalline material 4 such as GaAs, GaP, InP or ZnSe is tightly filled into the conical hollow part so as to surely coat the tapering part 10 with B2O3 when the B2O3 material 5 melts. A truncated conical polycrystalline material 4 is most preferably used. A vertical boat method is adopted as a crystal growth method and a crystal is grown, e.g. by a VB method by which a crystal is solidified by varying the relative position of the crucible 1 and a furnace while keeping a constant temperature gradient or a VGF method by which a crystal is solidified by controlling the temperature of a heater while fixing the furnace.
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申请公布号 |
JP2000154089(A) |
申请公布日期 |
2000.06.06 |
申请号 |
JP19980327063 |
申请日期 |
1998.11.17 |
申请人 |
MITSUBISHI CHEMICALS CORP |
发明人 |
FUJISAWA HIDEO;KATANO CHIKU;YAMAMOTO OSAMU |
分类号 |
H01L21/208;C30B11/00;(IPC1-7):C30B11/00 |
主分类号 |
H01L21/208 |
代理机构 |
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地址 |
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