| 摘要 |
PROBLEM TO BE SOLVED: To provide an ozone water supply equipment which is compact and operated with high accuracy. SOLUTION: In this equipment, ozone-containing water is almost always jetted into a tank 3 cooled to a temperature within a specified range with a nonadiabatic flow passage formed in a thin heat exchange jacket 5 and gaseous ozone from an anode trap 22 of a water electrolysis type ozone generation cell is sucked into the ozone-containing water with an aspirator 9 and mixed with water in the tank 3 to form ozone water and to introduce the ozone water in the tank 3 into the flow passage of the jacket 5, that is communicated with a withdrawal/supply passage 2 for supplying the ozone water to utilization sites. The withdrawal/supply passage 2 has at a midway point of it, a branch passage 7 and communicates the ozone-containing water to the aspirator 9 through the branch passage 7. Also, the heat exchange jacket 5 inside has a sensor 31 for sensing the temperature inside the flow passage of the jacket 5 and on one side of the jacket 5, the anode trap 22 is formed integrally with the jacket 5 by wide area contact through an aluminum plate and on the other side of the jacket 5, a Peltier cooling unit 6 is formed integrally with the jacket 5 by similar wide area contact. Further, a control means 30 for the Peltier cooling unit 6 is connected to the sensor 31. |
