| 摘要 |
PROBLEM TO BE SOLVED: To enable a compliance unit to compactly and smoothly actuate by providing a compliance function in a Z-axis direction perpendicular to an X-Y plane as well as in the X-Y plane. SOLUTION: In this unit, a slide member guided to move in a Z-axis direction by an inner circumference of a body 1 through a slide element 20 is engaged in the body in a cylindrical form. On the inner side of the slide member, a base plate 32 integrated with a table 31 is slidably disposed in an X-Y plane perpendicular to the Z-axis direction through a plane slide element 30.
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