| 摘要 |
PROBLEM TO BE SOLVED: To reduce a friction coefficient during contact-start-stop or loading/ unloading and improve reliability by providing a concave and convex configuration generating layer made of an alloy including, as a main component, Al containing oxygen or oxygen containing Al. SOLUTION: On a substrate 10 made of chemically reinforced soda-lime glass, first underlying layers 11, 11' made of a CoCrZr alloy are formed without heating the substrate. The substrate is then heated up to 130 deg.C and concave and convex configuration generating layers 12, 12' made of an AlCr alloy are formed. Second underlying layers 13, 13' made of a NiCrZn alloy are formed thereon under Ar gas pressure, and third underlying layers 14, 14' made of a CrTi alloy are further formed. Thereafter, the substrate is heated up to 250 deg.C, and CoCrPt alloy magnetic layers 15, 15' are formed, which is further sequentially followed by formation of carbon protective coating layers 16, 16' under Ar gas pressure. Thus, the concave and convex configuration generating layers can be stably formed, and stable floating with a small amount of floating can be realized.
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