| 摘要 |
PROBLEM TO BE SOLVED: To easily, rapidly and accurately perform processing for loading both of front side and back side masks on both front and back surface sides of a member to be aligned by driving at least two of an image pickup means, the front side mask and the back side mask by a driving means. SOLUTION: A controller calculates relative deviation between alignment marks FAM1 and BAM1 based on a superposed image obtained by superposing the alignment mark FAM1 on the front side mask and the alignment mark BAM1 on the back side mask picked up by a camera 50a, and drives and controls a camera driving mechanism 52a or a surface printing frame driving mechanism 55 so as to correct the relative deviation. It similarly calculates the relative deviation between the alignment marks FAM2 and BAM2 based on the superposed image obtained by superposing the alignment mark FAM2 on the front side mask and the alignment mark BAM2 on the back side mask picked up by a camera 50b, and drives and controls a camera driving mechanism 52b or the mechanism 55 so as to correct the relative deviation.
|
