| 摘要 |
A differential motor drive for an XY stage comprising a fixed base and two moveable platforms where the platforms' movements are orthogonal with respect to each other. Both motors for the X and the Y stages are located on the fixed base and do not move with either of the moving platforms. As the motors rotate at substantially the same speed in substantially opposite directions only the Y stage moves. As the motors rotate at substantially the same speed in substantially the same direction only the X stage moves. As the motors rotate at different speeds in either the same or opposite directions, both the X and Y stages move.
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