发明名称 METHOD AND APPARATUS FOR PREPARING THIN FILM
摘要 PROBLEM TO BE SOLVED: To facilitate the formation of a thin film containing two materials (X, Y) even when the materials (X, Y) can not be dissolved in the same solvent by attaching, to a substrate, minute drops of a solution of material X and that of a solution of material Y. SOLUTION: A mixture of a solution (x) containing dissolved material X with a solution (y) containing dissolved material Y is formed into minute drops having an average particle size of 100μm or lower and attached to a substrate. A thin film is formed as follows: figure (a) shows a state of two kinds of liquid drops approaching a substrate; figure (b) shows two kinds of liquid drops attached to the substrate; and figure (c) shows a thin film, partially magnified, formed on the substrate. When the particle sizes of the liquid drops are 100μm or lower, the solvent evaporates before the liquid drops are brought into contact with each other to form a liquid film. After the evaporation of the solvent, a thin film wherein X and Y are not microscopically mixed with each other as shown by the figure (c) but are macroscopically mixed with each other can be formed on the substrate.
申请公布号 JP2000153186(A) 申请公布日期 2000.06.06
申请号 JP19980326373 申请日期 1998.11.17
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 NAKAGAWA TORU
分类号 B05B7/24;C03C25/00;G02F1/13;(IPC1-7):B05B7/24 主分类号 B05B7/24
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