| 摘要 |
PROBLEM TO BE SOLVED: To obtain a microscope objective lens which can be used not only for the light of wavelength 248 nm but also for the ultraviolet rays of short wavelength 193 nm to 157 nm by making each of all the lens components constituting 1st and 2nd lens groups a single lens arranged separated with air spacing with each other and making the objective lens satisfy specified conditions. SOLUTION: Each of all the lens components L constituting the 1st and the 2nd lens groups G1 and G2 is a single lens arranged separated with air spacing with each other. When it is assumed that the focal length of the 1st lens groups G1 is f1, the focal length of the entire microscope objective lens is (f), and the number of negative lens components out of all the lens components constituting the objective lens is N, the objective lens satisfies the conditions -11<f1/f<-4.5 and 1<=N<=3. This objective lens is an optical system suitable for fetching a pattern image by using the ultraviolet ray in the case of measuring and inspecting the fine pattern of a semiconductor device and a micro machine and useful to produce the fine pattern.
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