发明名称 |
Photoresist dispense pump |
摘要 |
A photoresist dispense pump receives photoresist from two pipelines, a first pipeline and a second pipeline, and pumps out the photoresist through a third pipeline. The photoresist dispense pump contains a first bellows and a second bellows receiving photoresist from the second pipeline, wherein the first bellows and the second bellows are separated by a partition. Photoresist is fed into the third pipeline from the second bellows. On the center region of the partition, there is a central diaphragm that allows photoresist to flow in a direction from the first bellows toward the second bellows, but not in the reverse direction.
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申请公布号 |
US6071094(A) |
申请公布日期 |
2000.06.06 |
申请号 |
US19980191801 |
申请日期 |
1998.11.13 |
申请人 |
UNITED INTEGRATED CIRCUITS CORP. |
发明人 |
YU, CHENG-HUNG;CHOU, MING-DER;LUO, CHING-TSAI;TIEN, TUNG-HSING |
分类号 |
B05C11/10;F04B43/08;G03F7/16;H01L21/00;(IPC1-7):F04B45/027;F04B53/10 |
主分类号 |
B05C11/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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