| 摘要 |
PURPOSE: A device for dry etching is provided to improve sealing effect by increasing contacting surface, to easily assemble, and to prevent a deviation while assembling. CONSTITUTION: A device for dry etching contains an electrode base(40) of upper part, a chamber wall(42), and an electrode(44) of upper part located under the electrode base of upper part for being supported by the chamber wall. Herein, the contacting part of the upper electrode and the chamber wall is completely attached without a gap. Therefore, the flat surfaces of the upper electrode and the chamber wall are attached for improving sealing effect. Herein, the most part of a screw cover(48) for fixing is in an inner wall(46) while projecting a certain part to upward for being inserted to the upper electrode while assembling the upper electrode and the chamber wall. Also, the upper electrode contains a groove for corresponding to the inner wall.
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