APPARATUS FOR MANUFACTURING SEMICONDUCTOR PROVIDING IMPROVED GAS INJECTION UNIT

摘要

PURPOSE: An apparatus for manufacturing a semiconductor providing an improved gas injection unit is provided to prevent a crack from being generated to the glass tube of a furnace. CONSTITUTION: An apparatus for manufacturing a semiconductor providing an improved gas injection unit includes a furnace(40) comprising a boat(46) able to stack an inner tube(44), an outer tube(42), and loaded between inner tubes a wafer and a gas injection unit(48) for injecting a source gas to form a material film in the boat. The gas injection unit is extended from the low part of the boat to the upper part of the boat to uniformly spray the source gas to the wafer stacked on the boat.