METHOD FOR PRODUCING THIN FILM TYPE OPTICAL PATH CONTROLLER

摘要

PURPOSE: A method for producing a thin film typed optical path controller is provided to improve the stability of a mirror by preventing an event separated the mirror from a post. CONSTITUTION: A thin film typed optical path controller contains an active matrix(100), a supporting element(175) formed in an upper part of the active matrix(100), an actuator(210) formed in a upper part of the supporting element(175) and a mirror(260) formed in an upper part of the actuator(210). The active matrix(100) contains a substrate(101) embedded P-MOS transistors(120) of M multiplied N(M,N are natural numbers), a first metal layer(135) formed in a upper part of the substrate(101) by extending from a drain(105) and a source(110) of the P-MOS transistor(120), a first protecting layer(140) formed in a upper part of the first metal layer(135), a second metal layer(145) formed in the upper part of the first protecting layer(140), a second protecting layer(150) formed in a upper part of the second metal layer(145) and a preventing layer of etching(155) formed in a upper part of the second protecting layer(150). The first metal layer(135) contains a drain pad extended from the drain(105) of the P-MOS transistor(120) for transferring a first signal(image signal) and the second metal layer comprises of a titanium layer and a nitride titanium layer.