ARM DEVICE OF SEMICONDUCTOR FABRICATION EQUIPMENT

摘要

PURPOSE: An arm device of a semiconductor fabrication equipment is provided to prevent the accumulation of particles and the generation of whirlpool caused by the design of the arm device of a photo spinner. CONSTITUTION: An arm device loads/unloads each wafer to each chamber in a spinner established in a clean room. And, the arm device is consisted of a vertical frame(100) having a vertical moving space and a bracket(102) established on the upper end of the frame. The bracket has a plus form by openings(104) in the upper end of the arm device. Herein, the openings are formed to be nearest one another in the range of not transforming or expanding the shape of the arm device, and formed as a maximum size to the surface area of the bracket.