| 摘要 |
PURPOSE: An apparatus for conveying test tray in cooling chamber of a handler is provided to reduce test tray conveying time by using plural holders when transporting the test tray vertically, to ensure cooling or defrost time of a semiconductor mounted on the test tray and to enable the test tray circulating inside of the chamber to operate as a buffer. CONSTITUTION: An apparatus for conveying test tray in cooling chamber of a handler includes a frame(110), a first guide(111) mounted stationary on the frame, a second guide(112), plural first conveyors(120,130), plural holders(140,150), and plural second conveyors(160,170). The second guide is implemented parallel to the frame away from the first guide by a predetermined distance. The plural first conveyors are implemented slidingly on the first and second guides to hold and convey the test trays from a test site. The plural holders are implemented stationary to the frame and hold the test tray from the plural first conveyors. The plural second conveyors are implemented slidingly on the first and second guides to hold, convey, and release the test trays held by the plural holders. |
