BOAT EXCHANGE APPARATUS HAVING TEMPERATURE DETECTOR IN CHEMICAL VAPOR DEPOSITION EQUIPMENT

摘要

PURPOSE: A boat exchange apparatus in a chemical vapor deposition equipment is provided to prevent problems according to excessive heat. CONSTITUTION: A boat exchange apparatus in a chemical vapor deposition equipment comprises a pair of fingers(20), a slider(26) and an elevator(30). The pair of fingers(20) is flexibly installed beside a support rod(22) to chuck a boat in which many wafers loaded. The slider(26) flexibly moves the pair of fingers(20). The elevator(30) moves the slider(26) up and down. Here, a heat-reduction device(23) is installed on a side edge of the support rod(22), A driver of a chemical vapor deposition equipment is controlled by an output signal from the heat-reduction device(23).