| 摘要 |
PURPOSE: A production method for a metal wire is provided to reduce a contact resistance with an upper metal wire layer by forming an inclined metal wire by etching metal layers with an insulating film having side walls on both sides as a mask. CONSTITUTION: To produce a metal wire, conductive layers are formed on a substrate(31) to form a first insulating film in the area of a metal wire on the conductive layers. Then, a second insulating film side wall is formed on both sides of the first insulating film, and an inclined metal wire is formed by etching the conductive layers with the first insulating film including the second insulating film side wall as a mask. The reliability of the metal wire is improved by reducing the contact resistance with the upper metal wire layer due to not generating etching residual material by easily etching an oxidation film of the part of the side of the metal wire by a misalignment while forming a contact hole.
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