| 摘要 |
PURPOSE: A doping device of dopants is provided to minimize a volume by simplifying a process by heating a substrate and doping dopants at the same time. CONSTITUTION: A doping device(IV) of dopants is composed of a substrate settler(200), a first gun(206), a second gun(204), a transporter(208), a driving unit(210), and a controller(212). Herein, the substrate settler has a substrate(202) on an upper surface, and the first gan supplies heating gas to the substrate. And, the second gan dopes dopants ion in a specific part of the substrate where the heating gas is supplied. The transporter transports the first and the second guns to a horizontal or a vertical axis, and the driving unit supplies driving force to the transporter. Moreover, the controller controls the transportation of the transporter. If the driving unit is turned on, the transporter transports the first gan and the second gan horizontally or vertically in the reference of the substrate by receiving the driving force of the driving unit. Moreover, the controller controls the transportation of the second gan after transporting the first gun.
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