| 摘要 |
PURPOSE: A transporter of a semiconductor wafer is provided to improve productivity by minimizing breakage while transporting a wafer by using the transporter having two or more robot arms. CONSTITUTION: A transporter(2) is composed of a first robot arm(21), a second robot arm(23), and a third robot arm(35). A sequential operation of the robot arm is performed by connecting belts because tension of the belt is increased after using the robot arm for a long time. Moreover, a controller(27) is equipped to control the tension of the belt. Herein, the controller is installed in the robot arm. The tension of the belt is controlled by constituting a head as a hexagonal head. Thereby, the breakage of the wafer due to the operation of the robot arm is prevented by previously removing a factor for hindering the operation of the robot arm.
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