LIFT FINGER FOR NITRIC TITANIUM

摘要

PURPOSE: A lift finger for nitric titanium is provided to be used for a chamber for nitric titanium or an aluminum process by changing inclination of end portion of the lift finger. CONSTITUTION: The lift finger(10) compensates location of a clamp(104) which prevents wafers from running away. Inclination of a lift finger(10) is same as that of a lift finger for aluminum. Outter shape and length of the lift finger(10) are different from those of the lift finger for aluminum. A slot(106) for the lift finger(10) in the clamp(104) is occluded to not only end-edge but declined portion of the lift finger(10), so that the clamp(104) does not move. Thereby, the lift finger(10) can be used for a chamber for nitric titanium or an aluminum process.