DEVICE FOR LOADING LARGE SIZED THIN FILMS

摘要

PURPOSE: A device for loading large sized thin films is provided to maximize the loaded amount of large sized thin films while eliminating the generation of defect in an effective part by minimizing the sag of the thin films in the loading device. CONSTITUTION: Supporting bars are formed at the four edges of a supporting panel in a rectangular. Also, plural supporting projections are formed on the rectangular supporting bars for a large thin film not to contact with the supporting bars. Herein, the supporting projections on the supporting bars of the front surface are arranged near the left and the right end parts for not interrupting the operation of a carrying device. In addition, a supporting bar of a cross shape is integrally connected with the rectangular supporting bar for connecting the central parts of the front and the rear surfaces and the central parts of the left and the right surfaces of the rectangular supporting bar.