METHOD AND SYSTEM FOR TRANSFERRING WAFER

摘要

PURPOSE: A system for transferring a wafer is provided to effectively process with another recipe for wafers in a single carrier. CONSTITUTION: A system for transferring a wafer includes a carrier(100) and a device(130) for separating and transferring the wafer. The carrier has a number 1 slot to number 10 slot, and wafers(111-120) are at each slot. To transfer the wafer, the wafer(111) flows in the number 1 slot by an A program recipe. Then, the wafer(112) flows in the number 2 slot by a B program recipe, and then the rest wafers(113-120) flow by a mass-production recipe. Flowing each wafer by corresponding program recipes is performed by the device for separating and transferring the wafers, witch is operated by a software program. Herein, the wafer not designated needs to wait in the carrier(110) or to flow with a recipe different from the designated wafer.