发明名称 Wire bonding apparatus and control method thereof
摘要 In a bonding method and apparatus, a bonding arm having a bonding tool at one end thereof is controlled to stop at a constant height position by a computer that incudes a memory containing positional deviation correction values which correct deviations at stopping positions of the bonding arm so that a bonding arm position controller is controlled by the positional deviation correction values.
申请公布号 US6070778(A) 申请公布日期 2000.06.06
申请号 US19980079215 申请日期 1998.05.14
申请人 KABUSHIKI KAISHA SHINKAWA 发明人 TAKAHASHI, KUNIYUKI;HAYASHI, HIJIRI
分类号 H01L21/60;B23K20/00;(IPC1-7):B23K37/00;B23K13/08;B23K15/02;B23K31/00;B23K31/02 主分类号 H01L21/60
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