METHOD AND APPARATUS FOR OPTICAL DETECTION OF EFFLUENT COMPOSITION
摘要
A method and apparatus for determining the composition of an effluent stream from a vacuum processing chamber. A cell placed in the effluent stream from the vacuum processing chamber creates a glow discharge from the constituents in the effluent stream. An optical detector measures a particular wavelength corresponding to the presence of a particular species. In one embodiment the output from the optical detector is used to determine the endpoint of a chamber cleaning process.
申请公布号
WO0031773(A1)
申请公布日期
2000.06.02
申请号
WO1999US26945
申请日期
1999.11.15
申请人
APPLIED MATERIALS, INC.
发明人
NOWAK, THOMAS;RAOUX, SEBASTIEN;SILVETTI, DAVE;WOLFE, STEFAN;NEWMAN, RUSS;YOUSIF, IMAD;MATTHEW, NED