发明名称 MICROMACHINED ACOUSTIC EJECTORS AND APPLICATIONS
摘要 Disclosed are micromachined acoustic ejector (12) for generating a jet stream (24) using a Helmholtz resonator (14), applications for the ejector (12) in microflight, active heat sinking and fluid pumping, and methods of manufacturing the resonator (14) and ejector device (12). The resonator (14) comprises a resonant diaphragm (26) and a drive electrode (28) to operate on a volume inside a cavity (30) of the resonator (14). The resonance frequency of the resonator (14) is correlated or matched to the resonance of the cavity (30). The volume is forced out of the resonator (14) through a throat (40), with the throat (40) being variable through the use of another diaphragm (48). A shroud (16) and a cover (18) can direct flow to the resonator (14). An array (102) of the ejectors (12) can be fabricated. A heater (44) can vary the resonance inside the cavity (30), and another diaphragm (46) can vary the geometry of the cavity (30).
申请公布号 WO0007735(A3) 申请公布日期 2000.06.02
申请号 WO1999US17652 申请日期 1999.08.04
申请人 THE REGENTS OF THE UNIVERSITY OF MICHIGAN;NAJAFI, KHALIL;BERNAL, LUIS, P.;AMIRPARVIZ, BABAK 发明人 NAJAFI, KHALIL;BERNAL, LUIS, P.;AMIRPARVIZ, BABAK
分类号 F04B19/00;F04F7/00;F15C5/00;(IPC1-7):B05B1/08 主分类号 F04B19/00
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