发明名称 |
Generating hole structure in number of mutually fixed, separate solid state layers involves using high depth resolution particle beam with gas introduced into region of incidence of beam |
摘要 |
The method involves using a particle beam (11) of high depth resolution incident on a region of the solid state layers in which the hole structure is to be produced, whereby a gas is introduced (17) at least in the region of incidence of the particle beam.
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申请公布号 |
DE19853224(A1) |
申请公布日期 |
2000.05.31 |
申请号 |
DE1998153224 |
申请日期 |
1998.11.18 |
申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. |
发明人 |
BRUENGER, WILHELM |
分类号 |
H01L49/00;(IPC1-7):H01L49/00 |
主分类号 |
H01L49/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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