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发明名称
PLASMA PROCESSING APPARATUS
摘要
申请公布号
EP1004136(A1)
申请公布日期
2000.05.31
申请号
EP19990926627
申请日期
1999.06.16
申请人
SURFACE TECHNOLOGY SYSTEMS LIMITED
发明人
BHARDWAJ, JYOTI, KIRON;LEA, LESLIE, MICHAEL
分类号
H05H1/46;B01J19/08;C23C14/34;C23F4/00;H01J37/32;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01J37/32
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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