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发明名称
Manipulator for positioning probes in apparatuses and in chambers
摘要
申请公布号
EP0983826(A3)
申请公布日期
2000.05.31
申请号
EP19990116530
申请日期
1999.08.24
申请人
INSTITUT FUER FESTKOERPER- UND WERKSTOFFORSCHUNG DRESDEN E.V.
发明人
MOEHLER, KLAUS;KNAUFF, OLIVER, DR.
分类号
B25J1/10;H01J37/20;(IPC1-7):B25J1/08
主分类号
B25J1/10
代理机构
代理人
主权项
地址
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