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发明名称
A method of depositing dielectric
摘要
申请公布号
GB0009139(D0)
申请公布日期
2000.05.31
申请号
GB20000009139
申请日期
2000.04.14
申请人
TRIKON HOLDINGS LIMITED
发明人
分类号
C23C14/34;C23C14/00;C23C14/08;C23C14/58;H01G4/12;H01L21/314;H01L21/316;H01L21/822;H01L27/04
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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