| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing system wherein an object to be processed is smoothly delivered between an air system region and a vacuum system region. SOLUTION: Between a transportation channel 10 side and process chambers side, load lock chambers 201a-201d are provided in multi stages. Related to the load lock chambers 201a-201d, the inside of it is an air atmosphere for delivery of a glass substrate G, which is changed to a vacuum atmosphere for transporting the glass substrate G to the process chamber side. |
