| 摘要 |
PROBLEM TO BE SOLVED: To provide a mechanism allowing observation while maintaining eccentricity even for a sample with a dimension larger than a standard sample thickness (height) in a sample stage for a scanning electron microscope car the like. SOLUTION: A plate 5 is fixed to a rod 4 of a sample tilting shaft in a sample stage, while an angle 8 is installed to the plate 5 via a guide rail 6. When a dimension of a sample is greater than a standard sample thickness, a position of the angle 8 is adjusted so that a distance C between the rotation center of the rod 4 and an upper face B of an X-Y inplane rotational plate 11 is increased.
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