| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser annealing furnace which is designed to prevent contamination on objects so to be treated, to shorten the treating time, to improve the quality of laser annealing, and to reduce the manufacturing cost. SOLUTION: A laser annealing furnace 3 is provided with a cassette station 32 which is arranged along a conveyance path A, an annealing chamber 37 in which a glass substrate is annealed with a laser beam and which is faced oppositely to the station 32, and a spin cleaning unit 36 which is provided adjacently to the chamber 37 and station 32. A transfer robot 35 provided between the station 32 and chamber 37 transfers the glass substrate received from the station 35 to the unit 36 and, after the substrate is cleaned, directly transfer the substrate to the chamber 37 from the unit 36. |
