| 摘要 |
PROBLEM TO BE SOLVED: To provide an observation device eliminating a deflection aberration of a lens system for providing a clear image as to an observation device photographing a sample via a lens system. SOLUTION: This observation device is provided with a movable stage 27 carrying a sample, a detection means 36 radiating a beam to the sample and detecting a secondary beam for forming an image, mapping optical systems 29, 32-35 arranged between the stage 27 and the detection means 36 for forming an image of the secondary beam on the detection surface of the detection means 36, an array photographing means (TDICCD sensor), a two-dimensional photographing means taking a picture of a previously prepared pattern via the mapping optical systems, a deflection amount computing means 39 using the pattern image taken by the two-dimensional photographing means for computing a deflection amount of an image in the mapping optical system, and setting means 39, 43 setting the number of integration stages of the array photographing means on the basis of the image deflection amount.
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