| 摘要 |
PROBLEM TO BE SOLVED: To discharge processing liquid even when the power of a liquid processor is off. SOLUTION: Pure water supplied from a pure water supply source 64 is sent to a pure water supply nozzle 55 through a pure water sending pipe 62. The working part 65 of an air operation system of air-driven valve 63 provided in the pure water sending pipe 62 and the first air supply mechanism 69 working with a power source 68 are connected with each other through air supply paths 70' and 70. The second air supply mechanism 72 is provided with a main circuit 74 wherein a sub switchover valve 78 is interposed, a bypass circuit 79 branching from the main circuit 74, a circular path 80, a bypass path 82 branching from the circular path 80, and a bypass path 85. With off of the power source 68, the main switchover valve 76 becomes automatically open, and the air supplied from a compressor 73 is supplied to the working part 63 of the air drive type of valve 63 through the main circuit 74. |
