| 摘要 |
PROBLEM TO BE SOLVED: To improve washing efficiency by washing a spin chuck well without dismounting it from a liquid-applying device. SOLUTION: Related to a liquid-applying device 1, a vacuum sucking pipe 4 of a spin chuck 3 is provided with a switching valve 8 for switching between a vacuum source pipe 6 connected to a vacuum source and a gas blowing pipe 7 connected to a gas source, and pack washing of the spin chuck 3, a solvent is discharged to the spin chuck 3 while switched to the gas blowing pipe 7 by the switching valve 8. Further, at washing the spin chuck, a washing liquid for washing the spin chuck is discharged from a liquid discharge nozzle (a liquid discharge means). |
