| 摘要 |
PROBLEM TO BE SOLVED: To prevent the additional functions of a semiconductor device from being failed when a pressure is given to a pressure sensor by providing at least one sensor to work together with a semiconductor chip so that a pressure working on a semiconductor chip is measured indirecly. SOLUTION: A position sensor functioning with a semiconductor chip 2 is formed to measure indirectly a pressure working on the semiconductor chip 2. The position sensor is provided with a capacitor provided with two electrodes 6 and 7, in which the electrode 6 is formed of a substrate of semiconductor chip and the electrode 7 is formed of conductive area. When a pressure in a sample chamber exceeds an allowable value, the backside of the semiconductor chip is brought into contact with the electrode 7 and it is supported thereby or on the bottom of a casing 5. If the electrodes 6 and 7 are brought into contact with each other, a current therebetween can be detected and evaluated to control the pressure in the sample chamber.
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