| 摘要 |
A method of manufacturing a data recording medium for recording and reproducing data by use of a magnetic field or light and formed of an ordered alloy thin film comprising the steps of forming at least one underlayer principally containing an element or a compound selected from the group consisting of Cr, Pt, Pd, Au, Fe, Ni, MgO, NiO and controlled in such a way that a crystal plane having a crystal lattice face of a Miller index (100) is in parallel to a substrate, and forming an ordered alloy layer with L10 crystal structure by sputter deposition within the range satisfying Equation 1: PxD>3000, where P is Ar sputter-gas pressure (Pa) and D is a target-substrate distance (mm), is disclosed. When a recording medium is formed of an ordered alloy thin film by using a glass substrate for a hard disk for industrial use, according to the method of the present invention, formation of an ordered phase required for exhibiting large magnetocrystalline anisotropy is accelerated at a low temperature allowing usage of the glass substrate, so that the recording medium is improved in thermal stability.
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