| 摘要 |
PROBLEM TO BE SOLVED: To generate a square-wave voltage whose rise time is 100 ns or less, pulse width is 5μs or larger, droop of flat top is 10% or less and peak value is 100 kV or larger. SOLUTION: This square-wave voltage generating device 100 is provided with a Marx circuit 40 that generates a high-voltage pulse voltage PV, a voltage chopping gap 50 connected parallel to the output part of the circuit 40, an intermediate accumulating capacitor 60 connected in the same manner, and an output gap switch 80 connected in series between the output part of the circuit 40 and that of the square-wave voltage generating device 100. The intermediate accumulating capacitor 60 has a static capacitance of 1/10 or lower than the equivalent static capacitance of the circuit 40 and 10 times or larger than its stray static capacitance of a load 20, and has the stray inductance of 1/10 or lower than the equivalent inductance of the circuit 40. The output gap switch 80 comprises a laser trigger gap using the laser as a trigger.
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