发明名称 Apparatus for fabricating semiconductor single crystal
摘要 The present invention utilizes a weighing detector as well as a weighing diameter-controlling method in a crystal-pulling apparatus using a wire method for measuring the crystal weight in accuracy. A pulling wire 4 and a wire rolling means 20, having a wire rolling drum 21, suspended on a weighing detector 2 in a freely rotating way. Accordingly, in the weighing detector 2, the weights of the pulling wire 4 and the wire rolling means 20 are served to balance the loading weight. In addition, the vertical central line 6 of the weighing detector, the rotating axis of the wire rolling drum 21, the rotating axis of the wire rolling means 20, and the axis of pulling crystals are all consistent. Consequently, the whole gravity center is located on the vertical central line of the weighing detector 2. When pulling the single crystals at the same time as rolling the wire, the gravity center of the wire rolling means is shifted merely depending on the diameter variation at the pulling wire. Therefore, the deviation of the single crystal-pulling axis while rolling the wire rolling means can be decreased. Therefore, it is possible to pull single crystals as well as weigh in a stable manner.
申请公布号 US6068699(A) 申请公布日期 2000.05.30
申请号 US19960702840 申请日期 1996.08.26
申请人 KOMATSU ELECTRONIC METALS CO., LTD. 发明人 TSUJI, HIDEKI;KAWABATA, MITSUNORI;HIRAISHI, YOSHINOBU
分类号 C30B15/28;C30B29/06;H01L21/208;(IPC1-7):C30B15/28 主分类号 C30B15/28
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