SUBSTRATE PROCESSING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a substrate processing device wherein the time required for inputting/outputting of a substrate is shortened while operativity at maintenance is improved. SOLUTION: Process regions A and B extending almost in parallel with a transportation region C in between are provided with a plurality of process units 200 while partition covers 100a and 100b are provided between the process regions A and B and the transportation region C. A hand 62 of a substrate transportation unit 60 provided in the transportation region C holes a substrate W while movable in X-axis, Z-axis, andθ-axis directions. The process unit 200 at the center part of the process regions A and B comprises a substrate input/output opening 210 at a front surface while the process units 200 on both sides comprise the substrate input/output opening 210 at a corner part facing the substrate transportation unit 60. A shutter 215 is provided at the substrate input/output opening 210 for free opening/closing. Related to the partition covers 100a and 100b, an opening part 120 is provided at a position facing the substrate opening 210.