发明名称 |
Spin-apply tool having exhaust ring |
摘要 |
A spin-apply tool avoids contamination of a substrate back surface by providing exhaust along or beyond a periphery of a splash shield. The peripheral exhaust pulls a mist of droplets of liquid spun off the substrate away from the substrate. The spin-apply tool includes a spin chuck for holding the substrate, a basin extending around the chuck, a splash shield in the basin, and an exhaust substantially symmetric with the center of the substrate. The chuck surface defines a plane, and the splash shield extends as a ring around the chuck at an angle to that plane sufficient to deflect liquid flying off the chuck down to the basin. The basin may have a removable liner that can be cleaned and reused. Use of solvent to clean the backside of substrates is avoided. And a basin drain is eliminated, eliminating the need for any solvent consumption.
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申请公布号 |
US6068881(A) |
申请公布日期 |
2000.05.30 |
申请号 |
US19980087023 |
申请日期 |
1998.05.29 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
VALLEY, ROBERT T.;VIENS, GARY P.;WEIGHTMAN, JAMES R. |
分类号 |
B05C11/08;G03F7/16;H01L21/00;(IPC1-7):B05D3/12 |
主分类号 |
B05C11/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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