发明名称 |
Semiconductor device and production method thereof |
摘要 |
On a silicon substrate 1 is provided a silicon oxide film 2, on which a polycrystalline silicon film 3 is formed by a low pressure CVD method at a monosilane partial pressure of no more than 10 Pa and a film formation temperature of no lower than 600 DEG C. The polycrystalline silicon film is doped with an impurity such as phosphorus in a concentration of 1x1020 atoms/cm3 to 1x1021 atoms/cm3 to form a phosphosilicate glass film 6, and after removing it, the polycrystalline silicon film is thermally oxidized in an oxidative atmosphere to form a dielectric film 5 on the surface. A polycrystalline silicon film 4 is formed on the dielectric film 5, which is treated as the oriented polycrystalline silicon film 3a to form an oriented polycrystalline silicon film 4a. The oriented polycrystalline silicon film 4a as an upper electrode and the oriented polycrystalline silicon film 3a as a lower electrode are wired to obtain a semiconductor device having a capacitor. Further, a thin film transistor of a high dielectric strength can be produced in a short time on the polycrystalline silicon which is oriented in a short time.
|
申请公布号 |
US6069388(A) |
申请公布日期 |
2000.05.30 |
申请号 |
US19970984144 |
申请日期 |
1997.12.03 |
申请人 |
ASAHI KASEI MICROSYSTEMS CO., LTD. |
发明人 |
OKUSA, YOSHIHIRO;YAMAUCHI, TATSUYA |
分类号 |
H01L21/02;H01L21/28;H01L21/336;H01L29/04;H01L29/786;(IPC1-7):H01G4/06 |
主分类号 |
H01L21/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|