| 摘要 |
PROBLEM TO BE SOLVED: To provide an efficient and sensitive method for deciding the condition of a laser mixed gas and degree of its aging or degradation. SOLUTION: A master data set, corresponding to a mixed gas wherein an output parameter such as output beam energy, is optimum to an input parameter such as a drive voltage applied to a discharge circuit of a discharge chamber by a power source is generally generated after the new filling at a factory. At another time, a current data set of output and input parameters corresponding to the current state of mixed gas is generated during the next start-up procedure (S4). The current state data set is then compared to the master data set (S5), so that the difference between the current state and the master data set is found (S6). Then, a followup procedure is performed automatically by a processor, based on the comparison (S9). |
