| 摘要 |
PROBLEM TO BE SOLVED: To provide a board processor where the control of temperature and humidity is possible under more energy saving and space saving than in the past and besides the time to reach the specified temperature or humidity is shorter than that in the past. SOLUTION: An air supplier 81 which supplies the cup CP of a resist applicator 30 with air at specified temperature and humidity is provided with a cooling dehumidifier 86 making use of a Peltier element, a heater 87, a humidifier 88, and a blower 89. This air supplier is provided with a second temperature and humidity sensor 92 on the side of the outlet 84, and a third temperature and humidity sensor 93 on the side of an inlet 83, and a controller 94 controls the cooling dehumidifier 86, the heater 87, and the humidifier 88, based on the difference between the temperature and humidity set at the place of the outlet 84 and the temperature and humidity detected with a third temperature and humidity sensor 93. |
