| 摘要 |
PROBLEM TO BE SOLVED: To uniform the incident light amount at a central part and peripheral part of a chip even with a large step between a photodiode surface and a metal film forming an opening, to provide the same sensitivity both at the central part and the peripheral part of the chip. SOLUTION: A CMOS sensor comprises, on a semiconductor substrate, an imaging region wherein a photodiode and a unit cell comprising a signal scanning circuit part are arrayed in 2-dimension and a signal line for reading the signal from each cell in the imaging region. Here, the center position of an opening region of a metal film 26 which specifies a region of a photodiode 22 which is irradiated with light is deviated to the center side of the chip relative to the center position of each corresponding photodiode 22.
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