发明名称 Methods of forming layers of particulates on substrates
摘要 A method of forming a layer of particulates on a substrate includes fastening the substrate to a support and submerging at least a portion of the substrate in a liquid. The liquid has particulates suspended on an upper surface thereof. The submerged substrate is moved relative to the suspended particulates to form a layer of the particulates supported on the substrate. After the layer of particulates is formed on the substrate, the substrate is removed from the support.
申请公布号 US6068878(A) 申请公布日期 2000.05.30
申请号 US19980146731 申请日期 1998.09.03
申请人 MICRON TECHNOLOGY, INC. 发明人 ALWAN, JAMES J.
分类号 B05D1/20;H01J9/02;(IPC1-7):B05D1/20 主分类号 B05D1/20
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