| 摘要 |
PROBLEM TO BE SOLVED: To obtain excellent high-frequency characteristics of a magnetic film, by laminating alternately its magnetic and intermediate layers having respectively specific compositions. SOLUTION: The magnetic layer of a magnetic film has the composition of (M1α1X1β1)100-δ1A1δ1, (whereα1,β1, andδ1 represent atomic wt.% and M1 is at least one kind selected from magnetic metals Fe, Co, and Ni, and X1 is at least one kind selected from Mg, Ca, Sr, Ba, Si, Ge, Sn, Al, and Ga, or X1 is at least one kind selected from the transition metals excluding therefrom M1, and A1 is at least one kind of O and N, and 0.1<=β1<=12,α1+β1=100, 0<=δ1<=10). Its intermediate layer has the composition of (M2α2X2β2)100-δ2A2δ2, (whereα2,β2, andδ2 represent atomic wt.% and respective M2, X2, and A2 are defined equally to respective M1, X1, and A1, and 0.1<=β2<=80,α2+β2=100,δ1<=δ2<=67). The magnetic and intemediate layers are laminated alternately.
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