摘要 |
PROBLEM TO BE SOLVED: To enable a texture device to have excellent CSS(contact start stop) characteristics, sticking characteristic and the low floating height of a magnetic head, to be all realized simultaneously. SOLUTION: A laser beam outputted from a laser beam generator 1 is projected to a substrate 6 through a dichroic mirror 9 and a converging mechanism 5. For the purpose of controlling an automatic focusing control mechanism provided in the converging mechanism 5, a laser beam from an auxiliary laser beam source 4 for such automatic mechanism passes through a beam splitter 3 and is made incident on the substrate 6 through the dichroic mirror 9 and the converging mechanism 5, with its reflected light received by a light receiving system 10. A differential in the fluctuation of the light receiving quantity of this system 10 is monitored by a differential measuring monitor 11, thereby making it possible to quickly deal with an abnormality. In addition, by recording this error with a recording means 13, it is also made possible to detect generation of defects due to change with time.
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