| 摘要 |
<p>PROBLEM TO BE SOLVED: To correct a deviation of a relative position caused by thermal expansion, softening of frit glass or the like, by joining a first substrate and a second substrate through a joining member, and by executing positioning between the first substrate and the second substrate, in vacuum. SOLUTION: After evacuation is executed sufficiently, and after confirming that degassed gas from members and water, oxygen or the like generated from glass frit are reduced below desired values, by an atmosphere measuring device in a chamber, adjustment of a relative position relation between a face plate 141 and a rear plate 145 is executed, so that the face plate 141 and the rear plate 145 keep the prescribed position relation, and simultaneously the face plate 141, the rear plate 145 and a support frame 22 are contacted and pressurized by using a Z-direction adjustment mechanism of the face plate 141. After fixed-time pressurization, and after keeping the temperature while adjustment of the relative position between the face plate 141 and the rear plate 145 is executed, the temperature is lowered following a prescribed temperature profile, and the glass frit is hardened, to thereby execute lamination.</p> |
